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| HPTA6000 High Temperature Pressure Sensor 0 to 6MPa pressure range high stability anti-high-temperature RoHS-compatible & Pb-free Provide the other gage pressure range sensor DESCRIPTION HPTA6000 is a kind of high temperature MEMS sensor based on SOI semiconductor materiel . Its operating temperature is -30~180C. With advanced beam--diaphragm structure design and stress equipartition technology adopted, HPTA6000 sensor has the advantages of high temperature resistance, transient high temperature shock immunity, high measuring range and high overload which make it ideal for pressure self-control testing equipments used in aerospace / aviation, energy transportation, oil exploitation, heat process automation in Chemical industry, metallurgical automation, etc. HPT series sensors have been widely used for measuring diesel spray pressure in the self-control testing components of diesel engines in vehicles and vessels. HPT sensors still can operate normally even though the environment temperature exceeds 180 . HPT sensors are produced first by ion implanting the four piezoresistors into silicon. The four resistors are connected in a Wheatstone bridge arrangement, whereby two resistors increase with positive pressure while the other two decrease in resistance. When pressure is applied to the device and two ports of the resistor bridge are supplied with power source, the other two ports will output an electric signal which is directly proportional to pressure. Stress equipartition technology is introduced into the design of die, making the device more robust against high overload. Furthermore, the resistors are isolated with insulating medium which guarantees the high steadiness of sensor device. Part number System Package: A: Absolute pressure sensor DIE Package HPTA 6000 Pressure type Pressure range Tel: +86-755-82973805 Fax: +86-755-82973550 E-mail: sales@hoperf.com http://www.hoperf.cn Characteristics Measurement Type Output Pressure Chip size Total height Glass thickness Hole diameter Maximum ratings Storage temperature Operating temperature Supply voltage (max.) Temperature VDD=5V Tst Ta VDD (C) (C) (V) -40--250 -30--180 10 signal from (mm2) (mm) (mm) (mm) media Non-aggressive fluids and gases AE2 compensated Front/ back 2.5x2.5 0.9 0.5 0.7 side Dimensions characteristics 0.25---0.35 - 0.25---- 0.15 - 0.10---+0.10 Temperature coefficients ofthe bridge resistance ( %/C) Temperature coefficientsof the Sensitivity ( %/C) Temperature coefficients of the Zero ( %/C) Characteristics Ta =25C VDD=5V Bridge resistance (min/max)Rs (K) Offset voltage (min/max)V0 (MV) Nonlinearity (typ)NL Output span (typ)VSP (FS) (MV) 4.0--6.0 -25---+25 0.2 25------40 Tel: +86-755-82973805 Fax: +86-755-82973550 E-mail: sales@hoperf.com http://www.hoperf.cn WAFER ELECTRICAL CONNECTIONS Pad NO 1 2 3 4 5 Chip dimensions2.5x2.5x0.9mm Connection Vout Vc Vout Vd Vd This document may contain preliminary information and is subject to change by Hope Microelectronics without notice. Hope Microelectronics assumes no responsibility or liability for any use of the information contained herein. Nothing in this document shall operate as an express HOPE MICROELECTRONICS CO.,LTD 4/F, Block B3, East Industrial Area, Huaqiaocheng, Shenzhen, Guangdong, China Tel: Fax: Email: 86-755-82973805 86-755-82973550 sales@hoperf.com http://www.hoperf.cn http://hoperf.en.alibaba.com (c)2006, HOPE MICROELECTRONICS CO.,LTD. All rights reserved. or implied license or indemnity under the intellectual property rights of Hope Microelectronics or third parties. The products described in this document are not intended for use in implantation or other direct life support applications where malfunction may result in the direct physical harm or injury to persons. NO WARRANTIES OF ANY KIND, INCLUDING, BUT NOT LIMITED TO, THE IMPLIED WARRANTIES OF MECHANTABILITY OR FITNESS FOR A ARTICULAR PURPOSE, ARE OFFERED IN THIS DOCUMENT. Website: http://www.hoperf.com Tel: +86-755-82973805 Fax: +86-755-82973550 E-mail: sales@hoperf.com http://www.hoperf.cn |
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